STAGE, STAGE APPARATUS PROVIDED WITH THE SAME, AND SEMICONDUCTOR INSPECTION APPARATUS PROVIDED WITH THE STAGE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a stage for easily reducing deformations such as extension and warp of a stage body, an also to provide a stage apparatus provided with the stage, and a semiconductor inspection apparatus provided with the stage apparatus.;SOLUTION: A Y axis stage 4 is provided with: the stage body 20 of a U-shaped cross section which is in a long length shape and extends in the longitudinal direction; and a pair of guide rails 15A extending in the longitudinal direction on a first surface (upper surface) 20a on the side of an X axis stage 7 (table) of the stage body 20 to guide the X axis stage 7 in one direction (X axis direction). A first reinforcing part 21 extending in the longitudinal direction on the side of the first surface 20a of the stage body 20 between the pair of guide parts 15A, and a second reinforcing part 22 extending in the longitudinal direction on a second surface (lower surface) 20b extending in parallel to the first surface 20a, are fixed to the stage body 20 extending in the longitudinal direction. Then, the stage body 20 is clamped by the first reinforcing part 21 and the second reinforcing part 22.;COPYRIGHT: (C)2010,JPO&INPIT