METHOD FOR MANUFACTURING SOLAR CELL BY UTILIZING INDUCTIVELY COUPLED PLAZMA ENHANCED CHEMICAL VAPOR DEPOSITION METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a method for manufacturing a solar cell by utilizing an inductively coupled plasma enhanced chemical vapor deposition method. PSOLUTION: In manufacturing a solar cell including: a first electrode; a first frame layer; an intrinsic layer; a second frame layer; and a second electrode, an inductively coupled plasma enhanced chemical vapor deposition device using a mixed gas containing a hydrogen (HSB2/SB) gas and a silane (SiHSB4/SB) gas is used, and the manufacturing method includes an intrinsic layer forming step of forming the intrinsic layer consisting of a hydride amorphous silicon thin film, wherein the mixed gas has the ratio (HSB2/SB/SiHSB4/SB) of the hydrogen gas and the silane gas to the hydrogen gas is 8-10. PCOPYRIGHT: (C)2010,JPO&INPIT