METHOD OF MANUFACTURING L10-ORDERED FEPT NANODOT ARRAY, L10-ORDERED FEPT NANODOT ARRAY MANUFACTURED BY USING THE SAME AND HIGH DENSITY MAGNETIC RECORDING MEDIUM USING L10-ORDERED FEPT NANODOT ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an L10-ordered FePt nanodot array.;SOLUTION: The method of manufacturing the L10-ordered FePt nanodot array includes: a first step of depositing an FePt thin film on a substrate; a second step of forming a thin film made of a polymer material on the FePt thin film deposited in the first step; a third step of bringing a mold into contact with the FePt thin film; a fourth step of annealing the mold and a polymer pattern; a fifth step of cooling and separating the mold and the polymer pattern which are annealed; a sixth step of controlling a size of the polymer pattern through reactive ion etching; a seventh step of ion milling a portion of the FePt thin film uncovered with the polymer pattern thus forming FePt nanodots and then removing a remaining polymer layer; and an eighth step of annealing the FePt nanodot array.;COPYRIGHT: (C)2010,JPO&INPIT