L10-ordered FePt nanodot array, method of manufacturing the same and high density magnetic recording medium using the same

摘要

This invention relates to a L10-ordered FePt nanodot array which is manufactured using capillary force lithography, to a method of manufacturing the L10-ordered FePt nanodot array and to a high density magnetic recording medium using the L10-ordered FePt nanodot array. This method includes depositing a FePt thin film on a MgO substrate, forming a thin film made of a polymer material on the deposited FePt thin film using spin coating, bringing a mold into contact with the spin coated FePt thin film, annealing the mold and a polymer pattern which are in contact with each other, cooling and separating the mold and the polymer pattern which are annealed, controlling a size of the polymer pattern through reactive ion etching, ion milling a portion of the FePt thin film uncovered with the polymer pattern thus forming a FePt nanodot array and then removing a remaining polymer layer, and annealing the FePt nanodot array.