METHOD FOR MANUFACTURING STAMPER FOR FLOW PATH MEMBER FOR FUEL CELL, METHOD FOR MANUFACTURING FLOW PATH MEMBER FOR FUEL CELL, AND FLOW PATH MEMBER FOR FUEL CELL, AND FUEL CELL

摘要

PPROBLEM TO BE SOLVED: To provide a resin formed article with a multi-step constitution formed with good accuracy, a flow path member for a fuel cell, and a method for manufacturing the same, and a method for manufacturing a stamper used for manufacturing them. PSOLUTION: The method for manufacturing the stamper for the resin formed article is the method for manufacturing the stamper for the resin article with the multi-step constitution having step differences of at least two steps, and the first layer resist 2 is formed on a base 1. A negative type resist is used as the first layer resist 2. A protruded part is formed on the base 1 with a first layer resist pattern 2a by a lithographic processing. The base 1 on which the protruded part is formed is coated with a second layer resist 5. A resist pattern 5a is formed on the resist pattern 2a by a lithographic processing. A metal is stuck on the base by a plating processing to form the stamper 8. PCOPYRIGHT: (C)2010,JPO&INPIT