METHOD FOR INCREASING FORM RESTORING FORCE OF PARTICLE DISPERSION TYPE MIXTURE FUNCTIONAL FLUID USING VARIED MAGNETIC FIELD AND POLISHING METHOD AND POLISHING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To solve the problem wherein a particle dispersion type mixture functional fluid has neither a sufficient form restoring force as a polishing tool for a micro workpiece having many irregularities and a complicated form, nor a high polishing efficiency.;SOLUTION: When a varied magnetic field is applied to the particle dispersion type mixture functional fluid showing only the low form restoring force under a static magnetic field, the fluid shows the high restoring force. When this fluid is used as a flexible polishing tool and a relative movement necessary for working is applied thereto, a smoothing operation following the surface of a three-dimensional form such as a bottom surface or a side surface of a micro groove, is provided.;COPYRIGHT: (C)2010,JPO&INPIT