METHOD FOR PRODUCING RUTHENIUM-CONTAINING FILM USING RUTHENIUM COMPLEX ORGANIC SOLVENT SOLUTION, AND RUTHENIUM-CONTAINING FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a ruthenium-containing film using (cyclopentadienyl) (2, 4-dimethylpentadienyl) ruthenium with a high melting point, or bis-(2, 4-dimethylpentadienyl) ruthenium.;SOLUTION: The ruthenium-containing film is produced by using an organic solvent solution of (cyclopentadienyl) (2, 4-dimethylpentadienyl) ruthenium or bis-(2, 4-dimethylpentadienyl) ruthenium as a raw material.;COPYRIGHT: (C)2010,JPO&INPIT