MICROCRYSTALLINE SILICON ALLOYS FOR THIN FILM, AND WAFER BASED SOLAR APPLICATIONS

摘要

PPROBLEM TO BE SOLVED: To provide a method and apparatus for forming a solar cell. PSOLUTION: Doped crystalline semiconductor alloys including carbon, oxygen and nitrogen are used as charge collection layers for thin-film solar cells. The semiconductor alloy layers are formed by providing a semiconductor source compound and a co-component source compound to a processing chamber and ionizing gases to deposit a layer on a substrate. The alloy layers provide improved control of refractive index, wide optical bandgap, high conductivity, and resistance to attack by oxygen. PCOPYRIGHT: (C)2010,JPO&INPIT