MEMS, VIBRATION GYROSCOPE, AND METHOD OF MANUFACTURING MEMS

摘要

PROBLEM TO BE SOLVED: To expand a region in an MEMS, where a piezoelectric element can be arranged.;SOLUTION: The MEMS includes: a flexible portion which includes an insulating layer having a plurality of contact holes formed and a semiconductor layer coming into contact with the insulating layer, and having flexibility; a plurality of conductors formed of a plurality of impurity diffusion regions formed in the semiconductor layer and separated from one another; a piezoelectric layer including a lower electrode layer laminated on a surface of the insulating layer and coming into contact with the conductors through the contact holes, a piezoelectric layer laminated on a surface of the lower electrode layer, and an upper electrode layer laminated on a surface of the piezoelectric layer, the piezoelectric element being positioned on the flexible portion; and a connection means formed of a conductor layer for connecting the upper electrode layer to the conductors through the contact holes formed at the flexible portion.;COPYRIGHT: (C)2010,JPO&INPIT