CHARGED PARTICLE RADIATION DEVICE, METHOD OF MANUFACTURING RESISTANCE, AND METHOD OF MANUFACTURING LARGE-SCALE INTEGRATED CIRCUIT

摘要

PPROBLEM TO BE SOLVED: To provide a charged particle radiation device improved in resolution by reducing effect on a resistance value caused by an ambient temperature change and providing a circuit for suppressing fluctuation of a gain of an operational amplifier of a control circuit. PSOLUTION: A control means for controlling a deflection means for deflecting a charged particle radiation includes an amplification circuit. The amplification circuit includes a resistor having a structure in which a first resistance of which a resistance value change to an ambient temperature of itself has a first property, and a second resistance of which a resistance value change to an ambient temperature of itself has a property opposite to the first property are integrated. PCOPYRIGHT: (C)2010,JPO&INPIT