The titanium oxide layer which is produced by the production method and this method of the titanium oxide layer which possesses Takamitsu catalyst activity

摘要

As for this invention, being the accumulation method of being based on the vacuum to the baseplate of titanium oxide layer from the vapor phase, at the baseplate temperature which is lower than the 500 from containing titanium oxide source under oxygen-containing atmosphere, from 25nm/second accumulation is done at low accumulation speed, the baseplate which 30 parts and under oxygen-containing atmosphere between the 1000 , coating makes after the said accumulating, at least from the 200 regards the method of featuring that it is heat-treated. Selective figure Figure 3