INJECTION STATE INSPECTING DEVICE, LIQUID INJECTING DEVICE, DEVICE FOR MANUFACTURING FLAT PANEL DISPLAY, DEVICE FOR MANUFACTURING SOLAR CELL PANEL, AND SOLAR CELL PANEL

摘要

PROBLEM TO BE SOLVED: To inspect the injection state of ink in real time following up ink injection while simplifying a mechanism.;SOLUTION: An injection state inspecting device includes: a chamber 41 for charging ink, which has a liquid nozzle hole 40 provided on a tip end thereof; and a piezoelectric element 42 which is provided to the chamber 41 and applies pressure to the ink charged in the chamber 41 by deforming operation by application of a voltage to inject the ink from the nozzle hole 40. The inspecting device is further provided with an inspection unit 50 which detects a voltage converted from pressure applied to the piezoelectric element 42 through capacity variation in the chamber 41 after the voltage application to the piezoelectric element 42, and inspects whether the injection state of ink from the nozzle is suitable based upon the detection result.;COPYRIGHT: (C)2010,JPO&INPIT