In the thin film deformation gauge which consists of deformation gauge and its design mannered null

摘要

PROBLEM TO BE SOLVED: To provide a thin-film strain gauge capable of measuring only strain without large effect of pressure and temperature variations. ;SOLUTION: The following equations (1) and (2) are the fundamental equations used for providing the gauge: K_sl=(K_w.lA+K_l.lB)/(lA+lB) (1) K_sw=(K_l.lA+K_w.lB)/(lA+lB) (2) (K_sl: Longitudinal gauge factor of a sensor K_sw: Wide gauge factor of a sensor K_l: Longitudinal strain sensitivity of a material alloy K_w: Wide strain sensitivity of a material alloy lA: Wide length of a resistor film lB: Longitudinal length of a resistor film). The longitudinal and wide strain sensitivities, K_l and K_w respectively, of a material alloy are measured. The ratio of a wide length of a resistor film lA to a longitudinal length of a resistor film lB can be obtained using a relation lB=-K_l/K_w.lA which is derived from the equation (2) by assuming the wide strain sensitivity of a material alloy equal to zero: K_w=0. The value of the longitudinal gauge factor of a sensor K_sl is obtained by substituting the ratio of a wide length of a resistor film lA to a longitudinal length of a resistor film lB into the equation (1). The shape characterizes that thin film strain gauge of a material alloy can be determined using the ratio of a wide length of a resistor film lA to a longitudinal length of a resistor film lB.;COPYRIGHT: (C)2003,JPO