The evaporation of the amorphous membrane which possesses the slope equipped band gap by electronic cyclotron resonance

摘要

The baseplate (14) the method of forming the membrane of the amorphous materials on is disclosed with the evaporation from the plasma. In order that the baseplate (14) it arranges inside the container, it introduces the fore-quarter gas for the membrane into the container each tube (20) via, designates inside the container as low pressure it extracts unreacted and the dissociation gas each tube (22) via from the container. It introduces microwave energy in order to form the plasma inside the container distributed electronic cyclotron resonance (DECR) with as a specified frequency and the pulse which output level continues in the gas inside the container, from the plasma the material evaporates on the baseplate. In order that it changes the band gap, over the thickness of the material which evaporated frequency of pulse and/or output level is changed while evaporating of the material. Selective figure Figure 1