In the monocrystal material production manner which produces the monocrystal material monocrystal material production

摘要

PROBLEM TO BE SOLVED: To improve product yields.;SOLUTION: In the method of producing a single crystal material by an edge-defined film-fed growth (EFG) method, the single crystal material having a flat plate form is produced by arranging a seed substrate 130 for crystal- growing in the vertical direction with respect to the longitudinal direction of a liquid pool 304 for growing the single crystal having the flat plate form and pulling up the seed. That is to say, it is possible to lower the rate of formation of crystal defects by making the contact area between the seed substrate 130 and the surface of the melt of a raw material small, and thereby it becomes possible to improve the yield of the produced single crystal material.;COPYRIGHT: (C)2001,JPO