In the sample survey instrument which inspects the sample

摘要

PPROBLEM TO BE SOLVED: To enhance a function for detecting a defect of a pattern of a sample to be inspected. PSOLUTION: Measuring pattern data for acquiring measured pattern data of the pattern of the sample to be inspected is compared with developing pattern data for generating the developing pattern data corresponding to the measuring pattern data from design data of the sample to be inspected, so as to detect the defect of the pattern of the sample to be inspected. PCOPYRIGHT: (C)2009,JPO&INPIT