The step which the pixel electrode which impresses electric field in production manner of the Liquid Crystal Display, production manner

摘要

PROBLEM TO BE SOLVED: To obtain a method for manufacturing a liquid crystal display device by which changes in the luminance in the sub-pixel part which comprises double exposure part(s) can be prevented.;SOLUTION: In the patterning process of a TFT array substrate for a liquid crystal display device, the substrate is subjected to division exposure. In the exposure process of a resist, the substrate is divided into a plurality of fractions and exposed by using a stepper. The part where two division exposure regions are overlapped includes a part subjected to double exposure by considering the exposure error. The double exposure part is established into a non-linear form in the sub-pixel part. By establishing like this, the double exposure part is not overlapped with a storage capacitance or signal lines. Thus, changes in the capacitance in the storage capacitance between the signal lines and pixel electrodes can be prevented and irregular display or changes in the luminance can be prevented.;COPYRIGHT: (C)2002,JPO