Production manner of the crevice equipped substrate, the crevice equipped substrate and the micro glass lens substrate, the transmitted die screen and rear die projector

摘要

PPROBLEM TO BE SOLVED: To provide a recessed substrate manufacturing method with which the final point of etching can exactly be judged, to provide a recessed substrate, a micro-lens substrate, a transmission screen and a rear type projector which are manufactured by using such a method. PSOLUTION: The invention is for the recessed substrate manufacturing method for forming a plurality of recesses on a substrate 5 by etching with a mask 6 that has a plurality of openings 63 made in it in a regular arrangement. The surface of the substrate to be etched has the first area 66 covered with the mask having the plurality of openings, and the second area 67 covered with a mask having a plurality of second openings 64 arranged having pitches smaller than the pitches between the first openings. In addition, a non-masking area 65 where a mask is not formed is provided between the first area and the second area. PCOPYRIGHT: (C)2005,JPO&NCIPI