In the substrate falling prevention feature and substrate survey instrument null attaching part which

摘要

PROBLEM TO BE SOLVED: To provide a mechanism for preventing falling of substrate which can prevent a substrate from falling off even when the substrate is defectively vacuum-chucked and a substrate inspection device provided with the mechanism. ;SOLUTION: This mechanism is provided with a locking member-moving means which retracts a locking member 24 from the front side of the surface of a substrate W when the substrate W is horizontally arranged with its rear surface R faced downward and, in addition, sets up the member 24 by facing the member 24 to the surface and peripheral edge of the substrate W when the substrate W is inclined from the horizontal state. Accordingly, the member 24 retreates and does not obstruct visual inspections, etc., when the substrate W is in the horizontal state and, in addition, can prevent a falling and slipping down of the substrate W even when the substrate W comes off due to defective chuck by vacuum even when the substrate W is inclined, because the locking member is faced to the surface and peripheral edge of the substrate W.;COPYRIGHT: (C)2001,JPO