A universal substrate sample fixture for efficient multi-instrument inspection of large, flexible substrates, with absolute position registration support

摘要

Diagnostic inspection for process optimisation and accelerated lifetime testing occupies a significant fraction of unit cost for both traditional, and emerging printed large-area electronic devices. Much of this testing is time-intensive, involving multiple instruments and expert-driven laboratory analysis, developing and correlating maps of local surface topography parameter variation, functional performance indicators and visual appearance. We present the concept and development of an affordable, universal substrate sample fixture (USSF) to enable large-area topography and functional performance measurements with greater efficiency, autonomy and accuracy of absolute feature registration. The USSF is initially optimised for diagnostic inspection of thin, rigid and flexible, highly-parallel manufactured samples up to 180 mm × 180 mm. The USSF is, therefore, particularly relevant for photovoltaic wafers, injection-moulded or embossed nanostructures, and roll-to-roll printed large-area electronics. The USSF incorporates a universal base plate for permanent installation, kinematic locators and semi-disposable substrate clamps. The USSF will also incorporate calibration artefact holders to encourage routine use of, for example, stage calibration line-scales and areal calibration artefacts. We demonstrate a semi-disposable sample mount designed to transfer an absolute coordinate system with a lateral repeatability of 100 μm between multiple instruments, including via storage and mail transport.