Lithographic apparatus or method for operating a lithographic processing cell, lithographic apparatus and lithographic processing cell

摘要

A method of generating a schedule for operation of a machine forming at least a part of a lithographic apparatus or a lithographic processing cell is disclosed. In the method, a plurality of weight factors are received for respective ones of a plurality of qualities affecting the outcome of a lithographic process. An optimum schedule of tasks to be performed to complete said lithographic process is generated, the optimum schedule being one whose outcome has a maximum value of total quality, where total quality is the sum of the products of the values of each of said qualities and the respective weight factors.