The primary film formation process which forms the primary film which possesses the skeletal section which was formed with

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a porous film hardly shrunk and deformed even when a thermal treatment is applied after the formation of the porous film by densifying a matrix part of a primary film to the utmost without being shrunk in the formation of the porous film, and the porous film formed by the method.;SOLUTION: The method of forming the porous film has a primary film forming process for forming the primary film having the matrix part formed from a matrix material and a porogen part formed from a porogen, a matrix raw material supply process for supplying the matrix raw material forming the matrix material dissolved in a super critical fluid or a subcritical fluid to the primary film and a removing process for removing the porogen from the porogen part of the primary film. In the removing process, it is preferable that the removal of the porogen is carried out in the super-critical fluid or the sub-critical fluid.;COPYRIGHT: (C)2005,JPO&NCIPI