Production method of the part and the said sealing compound which for the plasma processor possess the sealing compound and the said sealing compound

摘要

This invention, offers the production method of the part, and the said sealing compound which for the plasma processor possess the sealing compound and the said sealing compound which possess resistance plasma characteristic, seal characteristic and the non sticking tendency which are superior. When it possesses the coating membrane which is formed to the surface of the fluoro elastomer sealing compound, from inorganic type material, at the same time, in pahuruorotori -n- butyl amine 70 hours it soaks with the 60C, removes and after, with the 90C 5 hours, with the 125C 10 hours making dry 5 hours and with the 200C weight decrease ratio of the sealing compound, 0.4 weight % is the sealing compound which is below.