SURFACE ACOUSTIC WAVE BASED HUMIDITY SENSOR APPARATUS WITH INTEGRATED SIGNAL CONDITIONING

摘要

A SAW-based humidity sensor apparatus with integrated signal conditioning on the same substrate. A micro-electronic circuit can be processed at a silicon substrate to obtain on-chip signal conditioning internally and the silicon substrate can be covered with a protective layer of, for example, silicon nitride. Surface acoustic wave media (e.g., a ZnO film) can be coated on top of the protective layer. A humidity sensitive film and two sets of interdigital transducers can then be deposited on the surface acoustic wave media. The humidity sensitive film absorbs moisture and changes the receiving frequency at the two sets of interdigital transducers. The output from the two sets of interdigital transducers can be processed by the micro-electronic circuit, which eliminates common mode noise and generates an output signal proportional to the humidity value tested.