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MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO-AXIS FORCE SENSORS
MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO-AXIS FORCE SENSORS
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机译:具有两轴力传感器的基于MEMS的微型和纳米抓爪
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摘要
The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.
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