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MAGNETRON CO-SPUTTERING DEVICE

机译:磁控共溅射装置

摘要

The present invention provides a magnetron co-sputtering device (6) comprising a main magnetron cathode (x) and a secondary cathode (Y) adapted to be associated with each other to sputter deposit a material on a substrate (2) arranged at a substrate position, the material comprising a first material derived from the main cathode (X) and a second material derived from the secondary cathode (Y), wherein the secondary cathode (Y) is arranged between the main cathode (X) and the substrate position, at a position selected from: (i) a position within a magnetic field derived from a main cathode (X) magnetic source, and (ii) a position within the footprint (6) of the main cathode (X).
机译:本发明提供了一种磁控共溅射装置( 6 ),其包括主磁控阴极(x)和副阴极(Y),所述主磁控阴极和副阴极适于彼此关联以在基板上溅射沉积材料。 ( 2 )布置在衬底位置处,该材料包括源自主阴极(X)的第一材料和源自次级阴极(Y)的第二材料,其中次级阴极(Y)布置在主阴极(X)和衬底位置之间的以下位置:(i)从主阴极(X)磁源产生的磁场内的位置,以及(ii)覆盖区内的位置(主阴极(X)的 6 )。

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