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LASER CRYSTALLIZATION METHOD FOR AMORPHOUS SEMICONDUCTOR THIN FILM
LASER CRYSTALLIZATION METHOD FOR AMORPHOUS SEMICONDUCTOR THIN FILM
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机译:非晶半导体薄膜的激光晶化方法
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摘要
A laser crystallization method in which an amorphous silicon thin film 2 formed on a substrate 1 is irradiated with a laser beam, the method including the steps of providing the amorphous silicon thin film 2 with an absorbent to form an absorbent layer 3 on the desired specific local areas of the amorphous silicon thin film 2 and laser annealing for crystallizing the specific local areas of the amorphous silicon thin film 2 by irradiating the amorphous silicon thin film 2 including the specific local areas with a semiconductor laser beam L having a specific wavelength absorbable by the absorbent layer 3 and unabsorbable by the amorphous silicon thin film 2 for heating the absorbent layer 3. 展开▼