RAPID SYNTHESIS OF POLYCRYSTALLINE SILICON SHEETS FOR PHOTO-VOLTAIC SOLAR CELL MANUFACTURING

摘要

A simple and direct methodology for synthesis of polycrystalline silicon sheets is demonstrated in our invention, where silica (SiO₂) and elemental carbon (C) are reacted under RF or MW excitation. These polycrystalline silicon sheets can be directly used as feedstock/substrates for low cost photovoltaic solar cell fabrication. Other techniques, such as textured polycrystalline silicon substrate formation, in situ doping, and in situ formation of p-n junctions, are described, which make use of processing equipments and scheme setups of various embodiments of the invention.