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Devices Comprising Carbon Nanotubes, And Methods Of Forming Devices Comprising Carbon Nanotubes

机译:包含碳纳米管的装置,以及形成包含碳纳米管的装置的方法

摘要

Some embodiments include devices that contain bundles of CNTs. An undulating topography extends over the CNTs and within spaces between the CNTs. A global maximum lateral width is defined as the greatest lateral width of any of the spaces. A material is directly over the CNTs, with the material being a plurality of particles that have minimum cross-sectional equatorial widths exceeding the global maximum lateral width. Some embodiments include methods in which a plurality of crossed carbon nanotubes are formed over a semiconductor substrate. The CNTs form an undulating upper topography extending across the CNTs and within spaces between the CNTs. A global maximum lateral width is defined as the greatest lateral width of any of the spaces. A material is deposited over the CNTs, with the material being deposited as particles that have minimum cross-sectional equatorial widths exceeding the global maximum lateral width.
机译:一些实施例包括包含CNT束的装置。起伏的形貌在CNT上以及在​​CNT之间的空间内延伸。整体最大横向宽度定义为任何空间的最大横向宽度。一种材料直接位于CNT之上,该材料是多个具有最小横截面赤道宽度超过全局最大横向宽度的颗粒。一些实施例包括其中在半导体衬底上方形成多个交叉的碳纳米管的方法。 CNT形成横跨CNT并且在CNT之间的空间内延伸的起伏的上部形貌。整体最大横向宽度定义为任何空间的最大横向宽度。将材料沉积在CNT上,并将该材料沉积为最小横截面赤道宽度超过全局最大横向宽度的颗粒。

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