首页>
外国专利>
Systems and Methods for Surface Modification by Filtered Cathodic Vacuum Arc
Systems and Methods for Surface Modification by Filtered Cathodic Vacuum Arc
展开▼
机译:通过过滤阴极真空电弧进行表面改性的系统和方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Provided are filtered cathodic vacuum arc systems useful for modifying a surface of a substrate (e.g. depositing a thin film of a material onto a surface of a substrate and/or implanting a material into the near-surface region of a substrate). The systems are configured to stabilize a do arc discharge plasma from an arc source. Also provided are methods for modifying a surface of a substrate, which in some cases includes depositing a material onto a surface of a substrate, in some cases includes implanting a material into the near-surface region of a substrate, and in some cases includes both depositing a material onto a surface of a substrate and implanting a material into the near-surface region of a substrate using the subject cathodic arc systems. In addition, magnetic recording media produced by the subject systems and methods are provided.
展开▼