APPARATUS AND METHOD OF USE FOR AN INERT GAS REBREATHER USED IN FURNACE OPERATIONS

摘要

This invention relates to an apparatus and a method of use for an inert gas rebreather used in furnace operations, such as melting and/or casting high purity silicon for solar cells and solar modules. The apparatus includes a process chamber, a reservoir in fluid communication with the process chamber, and a motive force device in fluid communication with the process chamber and the reservoir. Recycling or reusing the inert gas reduces operating expenses of the casting process while maintaining low impurity levels in the cast silicon.