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Photon-Emission Scanning Tunneling Microscopy

机译:光子发射扫描隧道显微镜

摘要

The present invention relates to an indirect-gap semiconductor substrate, the gap being greater than that of silicon and preferably greater than 1.5 eV, to its use for imaging a specimen by photon-emission scanning tunnel microscopy, and to a photon-emission scanning tunnel imaging method using such an indirect-gap semiconductor substrate. Advantageously, the indirect-gap semiconductor substrate is made of silicon carbide. The present invention also relates to devices for implementing the imaging method according to the invention.
机译:本发明涉及一种间接间隙半导体衬底,该间隙大于硅的间隙并且优选地大于1.5eV,涉及其通过光子发射扫描隧道显微镜对样本成像的用途,以及一种光子发射扫描隧道。使用这种间接间隙半导体衬底的成像方法。有利地,间接间隙半导体衬底由碳化硅制成。本发明还涉及用于实现根据本发明的成像方法的设备。

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