Thermal displacement-based radiation detector of high sensitivity

摘要

A radiation detector comprises an infrared radiation sensing micro mirror array, where each micro mirror is supported with a deformable cantilever beam having an organic layer for increased dynamic range. The radiation detector includes two or more sources of optical radiation for irradiating the micro mirror array, an image sensor array for receiving optical reflection from the micro mirror array, and an aperture plate for (i) spatially restricting optical radiation reaching the micro mirror array and (ii) spatially restricting reflected optical reflection reaching the image sensor array.