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Split-phase chamber modeling for chamber matching and fault detection
Split-phase chamber modeling for chamber matching and fault detection
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机译:分相腔室建模,用于腔室匹配和故障检测
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摘要
In at least one embodiment, the present invention is a method for thin-film process chamber data analysis, which includes acquiring chamber data, defining an adjustment portion of the chamber data and a steady-state portion of the chamber data, and forming a chamber model having an adjustment portion and a steady-state portion. The method can further include comparing the chamber model with a subject chamber to provide a chamber data comparison and utilizing the chamber data comparison.
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