Position-measuring device for determining the position of two objects movable with respect to each other along a measuring direction, and method for forming a reference pulse for such a position-measuring device

摘要

A position-measuring device for determining the positions of two objects movable with respect to each other along a measuring direction includes a first radiation source for emitting an electromagnetic beam of rays, a beam splitter, which splits each beam of rays emitted by the radiation source into at least one first and one second partial beam of rays, a reference reflector arranged in the beam path of the first partial beam of rays, a measuring reflector, movable with respect to the reference reflector along the measuring direction, which is arranged in the beam path of the second partial beam of rays, a device for superposing the two partial rays of beams after their reflecting at the respective reflector, for generating a measuring signal, a second radiation source for emitting additional electromagnetic beams of rays and a combining device for combining the additional electromagnetic beams of rays into the beam path of the electromagnetic beam of rays generated by the first radiation source. In the position-measuring device, a detection device is arranged such that it receives a reference signal formed by superposition of the beams of rays emitted by the first radiation source and the additional beams of rays, and an evaluation device is assigned to the detection device, which is equipped and provided for evaluating the reference signal formed by the superposition of the beams of rays of the two radiation sources for generating a reference pulse.