process for operating a pulsed arc evaporator source as well as a vacuum processing system with pulsed arc evaporator source

摘要

PROCESS FOR OPERATING A PULSE ARC EVAPORATOR SOURCE AS WELL AS A VACUUM PROCESSING SYSTEM WITH PULSE ARC EVAPORATOR SOURCE. The present invention relates to a vacuum processing system for surface treatment of workpieces (3) with an arc evaporator source (5) containing a first electrode (5 ') which is connected with a DC power supply (13), and with a second electrode (3, 18, 20) arranged separately from the arc evaporator source (5). The two electrodes (5 ', 3,18,20) are operated connected with an individual pulsed current supply (16).