Method for measuring thickness of transparent micro-layers on transparent substrate and optical thickness gauge

摘要

The invented method for measuring thickness of transparent micro-layers on transparent substrate is characterized by both measuring transmittance (T) of a transparent micro-layer of a material applied to a transparent substrate and measuring of a continuously varying transmittance (Tie) of a transparent micro-layer of the same material having known and continuously varying thickness disposed in an optical thickness gauge, whereby by comparing the transmittance (T) of the transparent micro-layer of the material applied to the transparent substrate with the identical transmittance (Tie) of known thickness of the transparent micro-layer of the same material in the optical thickness gauge, the thickness of the transparent micro-layer of the material applied to the transparent substrate is determined. The optical thickness gauge (7) is an optical linear wedge (13) or en optical spherical wedge (12) formed by a first glass element with a color micro-layer (8) applied thereto by placing a correspondingly shaped second glass element onto said first glass element wherein the color micro-layer (8) has exact definition of a continuously varying thickness.