Broadband Interferometry - A Non-Contact Optical Method for Measuring the Thickness of Transparent Thin Films and Coatings

摘要

An introduction to thin film interference, and how this can be used to measure the thickness of thin films. The importance of refractive index to determine physical layer thickness. What degree of accuracy is possible, and what are the main determinants?rnWhat happens if there is more than one layer? Description of a practical off-line instrument. What materials can be measured, and how many layers? And what sorts of materials can't be measured with it?rnAdapting the instrument for in-line use. Why there are performance issues due to line speed, and how these will be overcome.