The thickness and shape measuring apparatus and method of the transparent thin film using white light interferometry

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and method for measuring the thickness and profile of a transparent film using a white-light interferometer, capable of simultaneously measuring the thickness and surface profile of the transparent thin film.;SOLUTION: In this method, after coherent light is separated according to frequency, a first interference fringe at each frequency is obtained, and after composite coherent light is separated according to frequency, a second interference fringe at each frequency is obtained. Further, a phase generated by the thickness of the thin film is obtained from the first interference fringe, and only information about the thickness of the thin film is obtained. Further, a phase is determined from the second interference fringe, and information about the surface of the thin film, including information about the thickness of the thin film is obtained. Further, by using the thin film thickness information, information about the surface profile of the thin film is acquired from the thin film surface information including the thin film thickness information.;COPYRIGHT: (C)2006,JPO&NCIPI