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Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

机译：使用白光扫描干涉测量法与反射测量法相结合的透明薄膜层的厚度和表面测量

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Taeyong Jo; KwangRak Kim; SeongRyong Kim; HeuiJae Pahk;
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年度 2014
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1. Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry [J] . Seung-Woo Kim, Gee-Hong Kim Applied optics . 1999,第28期

机译：白光扫描干涉法测量透明薄膜层的厚度轮廓
2. Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry [J] . Jing-tao Dong, Rong-sheng Lu Applied optics . 2012,第23期

机译：垂直扫描白光干涉法测量薄膜厚度的灵敏度分析
3. Local inspection of refractive index and thickness of thick transparent layers using spectral reflectance measurements in low coherence scanning interferometry [J] . Claveau Remy, Montgomery Paul, Flury Manuel, Optical Materials . 2018,第Deca期

机译：在低相干扫描干涉法中使用光谱反射率测量来局部检查厚透明层的折射率和厚度
4. Tomographic analysis of medium thickness transparent layers using white light scanning interferometry and XZ fringe image processing [C] . P. C. Montgomery, D. Montaner, F. Salzenstein Conference on optical micro- and nanometrology IV . 2012

机译：使用白光扫描干涉法和XZ条纹图像处理的中等厚度透明层的层析成像分析
5. Scanning Tunneling Microscopy/Spectroscopy Measurements and Density Functional Theory Calculations on Iridium-Modified Silicon Surfaces and Self-Assembled Monolayer of Organic Molecules on Graphite [D] . Fatima, Fnu. 2018

机译：铱修饰的硅表面和石墨上有机分子自组装单层的扫描隧道显微镜/光谱测量和密度泛函理论计算
6. Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry [O] . Tong Guo, Siming Wang, Dante J. Dorantes-Gonzalez, 2012

机译：结合白光扫描干涉法的混合原子力显微镜测量系统的开发
7. Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry [O] . Young-Sik Ghim, Seung-Woo Kim 2006

机译：薄膜厚度曲线及其分散白光干涉测量的折射率测量

Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry

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