MICRO-FLUID EJECTION DEVICE HAVING HIGH RESISTANCE HEATER FILM

摘要

A semiconductor substrate for a micro-fluid ejection head. The substrateincludes a plurality of fluid ejection actuators disposed on the substrate.Each of the fluid ejection actuators includes a thin heater stack comprising athin film heater and one or more protective layers adjacent the heater. Thethin film heater is made of a tantalum-aluminum-nitride thin film materialhaving a nano-crystalline structure consisting essentially of A1N, TaN, andTaA1 alloys, and has a sheet resistance ranging from about 30 to about 100ohms per square. The thin film material contains from about 30 to about 70atomic% tantalum, from about 10 to about 40 atomic% aluminum and from about 5to about 30 atomic% nitrogen.