PLASMA REACTOR ELECTROSTATIC CHUCK HAVING A COAXIAL RF FEED AND MULTIZONE AC HEATER POWER TRANSMISSION THROUGH THE COAXIAL FEED

摘要

A workplace support pedestal includes an insulating puck having a workpiece support surface, a conductive plate underlying the puck, the puck containing electrical utilities an? thermal media channels, and an axialIy translatable coaxial RF path assembly underlying the conductive plate, The coaxial RF path assembly includes a center conductor, a grounded outer conductor and a tubular insulator separating the center and outer conductors, whereby the puck, plate and coaxial RF path assembly comprise a movable assembly whose axial movement is controlled by a lift servo. Plural conduits extend axialIy through the center conductor and are coupled, to the thermal media utilities. Plural electrical conductors extend axially through the tubular insulator and are connected to the electrical utilities.