ADAPTIVE FLY-EYE AND OTHER MIRRORS FOR EXTREME ULTRAVIOLET AND OTHER OPTICAL SYSTEMS

摘要

Segmented mirrors and adaptive mirrors are disclosed, along with methods involving use of same. An exemplary segmented mirror (150, 150b) includes an array of multiple mirror elements and a monitoring device (160a-166a). The mirror elements have respective reflective surfaces and are respectively movable. The elements reflect respective portions of a beam of utility light incident on the array. The monitoring device is situated relative to the array and includes a source of sensor light (160a) and a Shack-Hartmann sensor (164a). The source is situated to direct the sensor light onto at least some of the elements, and the Shack-Hartmann sensor (164a) is situated to receive sensor light reflected from the elements. The sensor can determine, from detected locations of focal spots of sensor light produced by the sensor, information concerning an optical result desirably being obtained by use of the segmented mirror.