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METHOD OF MAKING ORGANIC THIN FILM TRANSISTORS USING A LASER INDUCED THERMAL TRANSFER PRINTING PROCESS

机译:激光诱导的热转移印刷工艺制备有机薄膜晶体管的方法

摘要

The present invention provides a method of manufacturing an organic thin film transistor (TFT), comprising: providing a substrate layer; providing a gate electrode layer; providing a dielectric material layer; providing an organic semiconductor (OSC) material layer; providing a source and drain electrode layer; and wherein one or more of the layers is deposited using a laser induced thermal imaging (LITI) process. Preferably the organic TFT is a bottom gate device and the source and drain electrodes are deposited on an organic semiconductor layer, or over a dielectric material layer using LITI. Further preferably a dopant material may be provided between the OSC material and the source and drain electrode layer, wherein the dopant material may also be deposited using LITI. Also preferably, wherein the dopant may be a charge neutral dopant such as substituted TCNQ or F4TCNQ.
机译:本发明提供一种制造有机薄膜晶体管(TFT)的方法,该方法包括:提供衬底层;以及在所述衬底层上形成有机层。提供栅电极层;提供介电材料层;提供有机半导体(OSC)材料层;提供源极和漏极层;其中一层或多层使用激光诱导热成像(LITI)工艺沉积。优选地,有机TFT是底栅器件,并且使用LITI将源电极和漏电极沉积在有机半导体层上或介电材料层上方。进一步优选地,可以在OSC材料与源电极层和漏电极层之间提供掺杂剂材料,其中也可以使用LITI来沉积掺杂剂材料。还优选地,其中掺杂剂可以是电荷中性掺杂剂,例如取代的TCNQ或F4TCNQ。

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