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USE OF HIGH-PURITY POLYCRYSTALLINE SILICON ROD AS FEED ROD IN MONOCRYSTALLINE SILICON ZONE MELTING PROCESS AND ITS MANUFACTURING METHOD
USE OF HIGH-PURITY POLYCRYSTALLINE SILICON ROD AS FEED ROD IN MONOCRYSTALLINE SILICON ZONE MELTING PROCESS AND ITS MANUFACTURING METHOD
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机译:高纯多晶硅棒在单晶硅带熔化过程中作为进料棒的使用及其制造方法
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摘要
The present invention discloses a use of high-purity polycrystalline silicon rod as feed rod in monocrystalline silicon zone melting process and its manufacturing method. The high-purity silicon rod is pressed into silicon rod with a diameter of 20mm-30mm by isostatic pressing method using silicon powder with purity of 99.9999%-99.9999999999%. Silicon powder used for the feedstock silicon rod has a diameter of 0.1mm-100mm.The density of the feedstock rod is 1.60-2.29g/cm3, anti-pressure parameter thereof is 0.1-50MPa and the purity thereof is 99.9999%-99.9999999999%. The feedstock rod has uniform density, which manifests in that an amplitude of density difference is 0-18% between any two points on any cross section of the silicon bulk. The high-purity polycrystalline silicon rod is of excellent anti-pressure performance and can be directly used as monocrystallinel silicon feedstock rod in zone melting process.
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