EQUI-BIAXIAL FLEXURE TEST DEVICE FOR THIN AND ULTRA-THIN SEMICONDUCTOR WAFERS AND OTHER WAFERS

摘要

A test device for applying a biaxial load on a test specimen includes a housing having an internal chamber and a support positioned in the internal chamber upon which the test specimen is positioned. The test specimen is engageable with the support to divide the internal chamber into a first chamber portion and a second chamber portion. The test device also includes an inlet through which a pressurized fluid is transferred to the first chamber portion to apply the biaxial load upon the test specimen, a pressure sensor operable to detect the pressure of the pressurized fluid in the first chamber portion, and a displacement sensor operable to detect movement of the test specimen in response to the biaxial load applied by the pressurized fluid. The test device enables determination of biaxial flexural strength and load deflection information for thin/ultra thin wafers of semiconductors and other brittle materials.