METHOD FOR DETECTING OXIGEN, METHOD FOR DETERMINING AIR LEAKAGE, GAS COMPONENT DETECTOR, AND VACUUM PROCESSOR

摘要

A method for detecting oxygen, wherein a grid (102), an ion collector (103), and a filament (101), on the surface of the metal of which an oxide is formed are prepared, the filament current flowing through the filament (101) is controlled in such a manner that an emission current becomes constant, thermo electrons are emitted by heat generation due to the energization of the filament current, ions are generated by ionizing gas, the ions are captured by the ion collector (103), and the oxygen present within a vacuum processing chamber is detected by measuring the value of the filament current.