FLIPPER DEVICE OF A SEMICONDUCTOR MANUFACTURING SYSTEM CAPABLE OF EFFICIENTLY FLIPPING A PLURALITY OF UNITS ON A BOAT

摘要

PURPOSE: A flipper device of a semiconductor manufacturing system is provided to perform a successive subsequent process by using a boat in which a plurality of units is loaded.;CONSTITUTION: A flipper device(100) of a semiconductor manufacturing system includes a turn jig unit part and a picker unit part. The turn jig unit part fixes a boat in which a plurality of semiconductor units is mounted, and rotates the fixed boat as 180 degree. The picker unit part fixes a rear surface of the boat rotated by the turn jig unit part, and loads the boat to a fixed position.;COPYRIGHT KIPO 2010