PIEZOELECTRIC TYPE RF MEMS SWITCH CAPABLE OF MINIMIZING ABRASION OF A CONTACT PAD, AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A piezoelectric type RF MEMS switch and a manufacturing method thereof are provided to prevent noise generation by arranging a driver of a bridge shape into a direction vertical to a direction of a signal line.;CONSTITUTION: Two signal terminals(210) are arranged in a bottom part of a top substrate. A supporting bar(110) has a cantilever structure, and is arranged on a bottom substrate(100). A plurality of drivers(120) is arranged on the supporting bar, and is driven by a piezoelectric force. A contact pad(130) is contacted with the two signal terminals in order to switch a signal. A hinge(110a) is extended from the supporting bar in order to connect the driver and the contact pad. A mold maintains a gap between the top substrate and the bottom substrate. A bonding layer bonds the top substrate to the bottom substrate.;COPYRIGHT KIPO 2010