VERTICAL CAVITY SURFACE EMITTING LASER(VCSEL), A VCSEL ARRAY DEVICE, AN OPTICAL SCANNING APPARATUS, AND AN IMAGE FORMING APPARATUS, CAPABLE OF PROJECTING A LIGHT ON A SUBSTRATE IN VERTICAL DIRECTION

摘要

PURPOSE: A vertical cavity surface emitting laser(VCSEL), a VCSEL array device, an optical scanning apparatus, and an image forming apparatus are provided to obtain a high quality of active layer by using a mesa structure which is formed by laminating the active layer, a selective oxidization, and a semiconductor film alternately.;CONSTITUTION: In a device, a lower reflector(12) is formed on a semiconductor substrate(11). The lower reflector is formed with semiconductor films having different refractive indexes, which are formed on the semiconductor substrate alternately. An upper reflector(17) is formed as a mesa structure, and the upper reflector includes an active layer, a selection oxidization layer(16), and semiconductor films. The active layer is formed on the lower reflector with a semiconductor material. The selection oxidization layer is formed on the active layer, and it is partly oxidized so that a narrow structure is formed. The semiconductor film having different refractive indexes is formed on the selection oxidization layer. A bottom electrode(21) is connected to the semiconductor substrate, and the upper electrode(20) is connected to the upper reflector.;COPYRIGHT KIPO 2010